Sputtered Titanium (Ti)

Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films.  An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.

Note:

  1. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  2. Typical WTWNU and WIWNU is +/- 10%

  3. Non-Semi Standard Thickness wafers need to be quoted for each order.  

  4. Multi-layer Film Stacks  are available, must be quoted for each order.


    Sputtered Metal and Dielectric Films

    Thickness
    250Å –  3,000Å
    Thickness Tolerance
    Target Thickness +/-10%
    Sides Pressed
    One
    Wafer Thickness
    Semi - Std. Thickness
    Wafer Material
    Silicon
    Gasses
    Argon
    Equipment
    3 Target side sputter system








    Wafer Size
    50.8mm, 76.2mm, 100mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 3,000
    $337.50
    $318.75
    $300.00

    Wafer Size
    125mm, 150mm

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 3,000
    $487.50
    $312.50
    $450.00

    Wafer Size
    200mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 3,000
    $712.50
    $693.75
    $675.00

    Wafer Size
    300mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 3,000
    $2,000.00
    $1,975.00
    $1,950.00