Sputtered Copper (Cu)
Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films. An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.
Note:
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Pricing includes cost of 250Å Ti adhesion layer. Chrome as an adhesion layer is available, must be quoted for each order
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We invoice in batches of 25 wafers . For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Typical WTWNU and WIWNU is +/- 10%
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Non-Semi Standard Thickness wafers need to be quoted for each order.
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Multi-Layer Films Stacks are available, must be quoted for each order.
Sputtered Metal and Dielectric Films
|
|
Thickness |
250Å - 20,000Å |
Thickness Tolerance |
Target Thickness +/-10% |
Sides Pressed |
One |
Wafer Thickness |
Semi - Std. Thickness |
Wafer Material |
Silicon |
Gasses |
Argon |
Equipment |
3 Target side sputter system |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 5,000 |
$337.50 |
$318.75 |
$300.00 |
5,001 - 10,000 | $412.50 |
$393.75 |
$375.00 |
10,001 - 15,000 |
$487.50 |
$468.75 |
$450.00 |
15,001 - 20,000 |
$562.50 |
$543.75 |
$525.00 |
Wafer Size
125mm, 150mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 5,000 |
$487.50 |
$468.75 |
$450.00 |
5,001 - 10,000 | $562.50 |
$543.75 |
$525.00 |
10,001 - 15,000 |
$637.50 |
$618.75 |
$600.00 |
15,001 - 20,000 |
$712.50 |
$693.75 |
$675.00 |
Wafer Size
200mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 5,000 |
$712.50 |
$693.75 |
$675.00 |
5,001 - 10,000 | $787.50 |
$768.75 |
$750.00 |
10,001 - 15,000 |
$862.50 |
$843.75 |
$825.00 |
15,001 - 20,000 |
$937.50 |
$918.75 |
$900.00 |
Wafer Size
300mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 5,000 |
$2,000.00 |
$1,975.00 |
$1,950.00 |
5,001 - 10,000 | $2,100.00 |
$2,075.00 |
$2,050.00 |
10,001 - 15,000 |
$2,200.00 |
$2,175.00 |
$2,150.00 |
15,001 - 20,000 |
$2,300.00 |
$2,275.00 |
$2,250.00 |