Reactively Sputtered Films
Titanium Oxide(Ta2O5), Tantalum Nitride(TaN), Titanium Nitride(TiN)
Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films. An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.
Note:
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Pricing includes cost of 250Å Ti adhesion layer. Chrome as an adhesion layer is available, must be quoted for each order.
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We invoice in batches of 25 wafers . For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Typical WTWNU and WIWNU is +/- 10%
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Non-Semi Standard Thickness wafers need to be quoted for each order.
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Multi-layer Film Stacks are available, must be quoted for each order.
Sputtered Metal and Dielectric Films
|
|
Thickness |
250Å - 3,000Å |
Thickness Tolerance |
Target Thickness +/-10% |
Sides Pressed |
One |
Wafer Thickness |
Semi - Std. Thickness |
Wafer Material |
Silicon |
Gasses |
Argon |
Equipment |
3 Target side sputter system |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 1,000 |
$600.00 |
$581.25 |
$562.50 |
1,001 - 2,000 |
$637.00 |
$618.00 |
$600.00 |
2,001 - 3,000 |
$675.00 |
$656.25 |
$637.50 |
Wafer Size
125mm, 150mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 1,000 |
$675.00 |
$656.25 |
$637.50 |
1,001 - 2,000 |
$712.50 |
$693.75 |
$675.00 |
2,001 - 3,000 |
$750.00 |
$731.25 |
$712.50 |
Wafer Size
200mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 1,000 |
$900.00 |
$881.25 |
$862.50 |
1,001 - 2,000 |
$937.50 |
$918.75 |
$900.00 |
2,001 - 3,000 |
$975.00 |
$956.25 |
$937.50 |
Wafer Size
300mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
250 - 1,000 |
$2,250.00 |
$2,225.00 |
$2,200.00 |
1,001 - 2,000 |
$2,300.00 |
$2,275.00 |
$2,250.00 |
2,001 - 3,000 |
$2,350.00 |
$2,325.00 |
$2,300.00 |