Reactively Sputtered Films

Titanium Oxide(Ta2O5), Tantalum Nitride(TaN), Titanium Nitride(TiN)

Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films.  An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.

Note:

  1. Pricing includes cost of 250Å Ti adhesion layer. Chrome as an adhesion layer is available, must be quoted for each order.

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 10%

  4. Non-Semi Standard Thickness wafers need to be quoted for each order.  

  5. Multi-layer Film Stacks  are available, must be quoted for each order.


    Sputtered Metal and Dielectric Films
    Thickness
    		 250Å -  3,000Å
    Thickness Tolerance
    		 Target Thickness +/-10%
    Sides Pressed
    		 One
    Wafer Thickness
    		 Semi - Std. Thickness
    Wafer Material
    		 Silicon
    Gasses
    		 Argon
    Equipment
    		 3 Target side sputter system








    Wafer Size
    50.8mm, 76.2mm, 100mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 1,000
    		 $600.00
    		 $581.25
    		 $562.50
    1,001 - 2,000
    		 $637.00
    		 $618.00
    		 $600.00
    2,001 - 3,000
    		 $675.00
    		 $656.25
    		 $637.50

    Wafer Size
    125mm, 150mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 1,000
    		 $675.00
    		 $656.25
    		 $637.50
    1,001 - 2,000
    		 $712.50
    		 $693.75
    		 $675.00
    2,001 - 3,000
    		 $750.00
    		 $731.25
    		 $712.50

    Wafer Size
    200mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 1,000
    		 $900.00
    		 $881.25
    		 $862.50
    1,001 - 2,000
    		 $937.50
    		 $918.75
    		 $900.00
    2,001 - 3,000
    		 $975.00
    		 $956.25
    		 $937.50

    Wafer Size
    300mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    250 - 1,000
    		 $2,250.00
    		 $2,225.00
    		 $2,200.00
    1,001 - 2,000
    		 $2,300.00
    		 $2,275.00
    		 $2,250.00
    2,001 - 3,000
    		 $2,350.00
    		 $2,325.00
    		 $2,300.00