2022 Pricing effective 10/1/21
Reactively Sputtered Films
Tantalum Oxide(Ta2O5), Tantalum Nitride(TaN), Titanium Nitride(TiN)
Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films. An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.
Note:
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Pricing includes cost of 500Å Ti adhesion layer. Chrome as an adhesion layer is available, must be quoted for each order.
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We invoice in batches of 25 wafers . For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Typical WTWNU and WIWNU is +/- 10%
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Non-Semi Standard Thickness wafers need to be quoted for each order.
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Multi-layer Film Stacks are available, must be quoted for each order.
Sputtered Metal and Dielectric Films
|
|
| Thickness |
250Å - 3,000Å |
| Thickness Tolerance |
Target Thickness +/-10% |
| Sides Pressed |
One |
| Wafer Thickness |
Semi - Std. Thickness |
| Wafer Material |
Silicon |
| Gasses |
Argon |
| Equipment |
3 Target side sputter system |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 1,000 |
$680.00 |
$660.00 |
$640.00 |
| 1,001 - 2,000 |
$720.00 |
$700.00 | $680.00 |
| 2,001 - 3,000 |
$760.00 |
$740.00 |
$720.00 |
Wafer Size
125mm, 150mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 1,000 |
$760.00 |
$740.00 |
$720.00 |
| 1,001 - 2,000 |
$800.00 | $780.00 | $760.00 |
| 2,001 - 3,000 |
$840.00 |
$820.00 |
$800.00 |
Wafer Size
200mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 1,000 |
$1,000.00 |
$980.00 |
$960.00 |
| 1,001 - 2,000 |
$1,040.00 | $1,020.00 | $1,000.00 |
| 2,001 - 3,000 | $1,080.00 |
$1,060.00 |
$1,040.00 |
Wafer Size
300mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 1,000 |
$2,300.00 |
$2,275.00 |
$2,250.00 |
| 1,001 - 2,000 |
$2,350.00 | $2,325.00 | $2,300.00 |
| 2,001 - 3,000 |
$2,400.00 |
$2,375.00 |
$2,350.00 |