2022 Pricing effective 10/1/21
Sputtered Metal
Chrome(Cr), Tantalum(Ta), Titanium Tungsten(TiW), Tungsten(W)
Our Sputtered Dielectric and Metal deposition is a single sided process that has been designed to deposit ultra-clean films. An in-situ RF etch is automatically added to the process to insure good film adhesion, and ohmic contact to underlying conductive layers.
Note:
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Pricing includes cost of 500Å Ti adhesion layer. Chrome as an adhesion layer is available, must be quoted for each order.
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We invoice in batches of 25 wafers . For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Typical WTWNU and WIWNU is +/- 10%
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Non-Semi Standard Thickness wafers need to be quoted for each order.
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Multi-layer Film Stacks are available, must be quoted for each order.
Sputtered Metal and Dielectric Films
|
|
| Thickness |
250Å - 3,000Å |
| Thickness Tolerance |
Target Thickness +/-10% |
| Sides Pressed |
One |
| Wafer Thickness |
Semi - Std. Thickness |
| Wafer Material |
Silicon |
| Gasses |
Argon |
| Equipment |
3 Target side sputter system |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 3,000 |
$480.00 |
$460.00 |
$440.00 |
Wafer Size
125mm, 150mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 3,000 |
$640.00 |
$620.00 |
$600.00 |
Wafer Size
200mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 3,000 |
$880.00 |
$860.00 |
$840.00 |
Wafer Size
300mm
Thickness (Å)
|
Price Per Lot
|
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 250 - 3,000 |
$2,150.00 |
$2,125.00 |
$2,100.00 |