Wet Thermal Oxide  

Our ultra-pure Wet Thermal oxidation process is designed to ensure that you receive the highest quality films. Prior to Thermal Oxidation all wafers will receive a pre-process clean.

Note:

  1. Any Thickness < 1,000 angstroms must be Dry Thermal Oxide or Dry Chlorinated Thermal Oxide.

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Float Zone Wafers (FZ)  can be run separate from non-FZ wafers for an additional US $100.00 (up to 25 wafers). For orders greater than 50 wafers this fee is waived.

  4. Typical WTWNU and WIWNU is +/- 5%

  5. Non-Semi Standard Thickness wafers need to be quoted for each order.

  6. Single Sided Processing  is available, must be quoted for each order.


      Wet Thermal Oxidation Parameters

    Thickness
    1,000Å – 60,000Å
    Thickness Tolerance
    Target Thickness +/-5%
    Sides Pressed
    Both
    Refractive Index
    1.456 +/-0.02 @ 632.8nm
    Film Stress
    -320MPa +/-50MPa (Compressive)
    Wafer Thickness
    Std. Thickness
    Wafer Material Silicon
    Temperature 900C° - 1050C°
    Gasses
    Oxygen
    Equipment Horizontal Furnace









    Wafer Size
    50.8mm, 76.2mm, 100mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    $225.00
    $150.00
    $112,50
    10,001 - 20,000
    $262.50 $187.50
    $150.00
    20,001 - 30,000
    $337.50
    $225,00
    $187.50
    30,001 - 40,000
    $412.50
    $337.50
    $300.00
    40,001 - 50,000
    $637.50
    $450.00
    $412.50
    50,001 - 60,000
    $1,125.00
    $787.50
    $675.00

    Wafer Size
    125mm,150mm

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    $262.50
    $187.50
    $150.00
    10,001 - 20,000
    $300.00 $225.00
    $187.50
    20,001 - 30,000
    $375.00
    $262.50
    $225.00
    30,001 - 40,000
    $450.00
    $375.00
    337.50$
    40,001 - 50,000
    $675.00
    $487.50
    $450.00
    50,001 - 60,000
    $1,162.50
    $825.00
    $712.50

    Wafer Size
    200mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    $300.00
    $225.00
    $187.50
    10,001 - 20,000
    $337.50 $262.50
    $225.00
    20,001 - 30,000
    $570.00
    $530.00
    $488.00
    30,001 - 40,000
    $690.00
    $650.00
    $610.00
    40,001 - 50,000
    $930.00
    $890.00
    $850.00
    50,001 - 60,000
    $1,280.00
    $1,200.00
    $1,120.00