2022 Pricing effective 10/1/21

Wet Thermal Oxide  

Our ultra-pure Wet Thermal oxidation process is designed to ensure that you receive the highest quality films. Prior to Thermal Oxidation all wafers will receive a pre-process clean.

Note:

  1. Any Thickness < 1,000 angstroms must be Dry Thermal Oxide or Dry Chlorinated Thermal Oxide.

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Float Zone Wafers (FZ)  can be run separate from non-FZ wafers for an additional US $100.00 (up to 25 wafers). For orders greater than 50 wafers this fee is waived.

  4. Typical WTWNU and WIWNU is +/- 5%

  5. Non-Semi Standard Thickness wafers need to be quoted for each order.

  6. Single Sided Processing  is available, must be quoted for each order.


      Wet Thermal Oxidation Parameters
    Thickness
    		 1,000Å – 60,000Å
    Thickness Tolerance
    		 Target Thickness +/-5%
    Sides Pressed
    		 Both
    Refractive Index
    		 1.456 +/-0.02 @ 632.8nm
    Film Stress
    		 -320MPa +/-50MPa (Compressive)
    Wafer Thickness
    		 Std. Thickness
    Wafer Material Silicon
    Temperature 900C° - 1050C°
    Gasses
    		 Oxygen
    Equipment Horizontal Furnace









    Wafer Size
    50.8mm, 76.2mm, 100mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    		 $280.00
    		 $200.00
    		 $160.00
    10,001 - 20,000
    		 $320.00 $240.00
    		 $200.00
    20,001 - 30,000
    		 $400.00
    		 $320.00
    		 $280.00
    30,001 - 40,000
    		 $560.00
    		 $480.00
    		 $440.00
    40,001 - 50,000
    		 $800.00
    		 $720.00
    		 $680.00
    50,001 - 60,000
    		 $1,240.00
    		 $1,080.00
    		 $1,000.00

    Wafer Size
    125mm,150mm

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    		 $320.00
    		 $240.00
    		 $200.00
    10,001 - 20,000
    		 $360.00 $280.00
    		 $240.00
    20,001 - 30,000
    		 $440.00
    		 $360.00
    		 $320.00
    30,001 - 40,000
    		 $600.00
    		 $520.00
    		 $480.00
    40,001 - 50,000
    		 $840.00
    		 $760.00
    		 $720.00
    50,001 - 60,000
    		 $1,280.00
    		 $1,120.00
    		 $1,040.00

    Wafer Size
    200mm 

    Thickness (Å)

    Price Per Lot

    Price Per Lot

    Price Per Lot

    1 Lot

    2-3 Lots

    4+  Lots

    1,000 - 10,000
    		 $360.00
    		 $280.00
    		 $240.00
    10,001 - 20,000
    		 $400.00 $320.00
    		 $280.00
    20,001 - 30,000
    		 $600.00
    		 $520.00
    		 $480.00
    30,001 - 40,000
    		 $800.00
    		 $720.00
    		 $680.00
    40,001 - 50,000
    		 $1,040.00
    		 $960.00
    		 $920.00
    50,001 - 60,000
    		 $1,480.00
    		 $1,320.00
    		 $1,240.00