2022 Pricing effective 10/1/21
Dry Thermal Oxide
Our ultra-pure Dry Oxidation process is available for those applications requiring thinner oxides, and is designed to ensure that you receive the highest quality film.
Note:
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All prices include the pre-process clean.
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Please note that we invoice in Batches of 25 wafers. For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Float Zone Wafers (FZ) can be run separate from non-FZ wafers for an additional US$100.00 (up to 25 wafers). For orders greater than 50 wafers this fee is waived.
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Typical WTWNU and WIWNU is +/- 5%
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Non-Semi Standard Thickness Wafers must be quoted each order.
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Single Sided Processing is available, must be quoted for each order.
Dry Thermal Oxidation Parameters |
|
| Thickness |
100Å – 3000Å |
| Thickness Tolerance |
100Å - 499Å +/-30%; 500Å + 999 +/-10%; ≥1,000Å +/-5% |
| Sides Pressed |
Both |
| Refractive Index |
1.456 +/-0.02 @ 632.8nm |
| Film Stress |
-320MPa +/-50MPa (Compressive) |
| Wafer Thickness |
Std. Thickness |
| Wafer Material |
Silicon
|
| Temperature | 900C° - 1050C° |
| Gasses |
Oxygen |
| Equipment | Horizontal Furnace |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness (Å)
|
Price Per Lot |
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 1,00 - 1,000 |
$400.00 |
$320.00 |
$280.00 |
| 1,001 - 2,000 |
$440.00 | $360.00 |
$320.00 |
| 2,001 - 3,000 |
$520.00 |
$440.00 |
$400.00 |
Wafer Size
125mm, 150mm
Thickness (Å)
|
Price Per Lot |
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 100 - 1,000 |
$440.00 | $360.00 |
$320.00 |
| 1,001 - 2,000 |
$480.00 | $400.00 |
$360.00 |
| 2,001 - 3,000 |
$560.00 |
$480.00 |
$440.00 |
Wafer Size
200mm
Thickness (Å)
|
Price Per Lot |
Price Per Lot
|
Price Per Lot |
1 Lot |
2-3 Lots |
4+ Lots |
|
| 100 - 1,000 |
$480.00 | $400.00 |
$360.00 |
| 1,001 - 2,000 |
$520.00 | $440.00 |
$400.00 |
| 2,001 - 3,000 |
$600.00 |
$520.00 |
$480.00 |