PECVD OxyNitride
Our PECVD OxyNitride is a unique film that is widely used in the fabrication of MEMS and Opto-Electronics devices. PECVD OxyNitride is mechanically stable and possesses optical properties that make this film ideal for building waveguides and integrated circuits. E-mail for lead time.
Note:
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Non-Silicon Substrates please e-mail for a quote .
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We invoice in batches of 25 wafers . For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.
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Typical WTWNU and WIWNU is +/- 7%
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Non - Semi Standard Thickness wafers need to be quoted for each order.
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Targeted Refractive Index (RI) OxyNitride is Available. Please e-mail for a quote.
PECVD OxyNitride Parameters |
|
Thickness |
300Å – 20,00Å |
Thickness Tolerance |
300Å - 999Å +/-10%; => 1,000Å+/-7% |
Sides Pressed |
One |
Refractive Index |
1.71 +/-0.05 @ 632.8nm |
Film Stress |
-400MPa +/-50MPa (Compressive) |
Wafer Material |
Silicon, Silicon on Insulator, Quartz, Glass, Sapphire |
Wafer Thickness |
Std. Thickness |
Temperature | 300C°- 400C° |
Gases | Silane, Ammonia, Nitrous oxide |
Equipment | PlasmaTherm and Novelles Deposition tools |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
300 - 5,000 |
$637.50 |
$600.00 |
5,001 - 10,000 |
$750.00 |
$712.50 |
10,001 - 20,000 |
$937.50 |
$900.00 |
20,001 - 30,000 |
$1,125.00 |
$1,087.50 |
30,000 - 40,000 |
$1,312.00 |
$1,275.00 |
40,001 - 50,000 |
$1,500.00 |
$1,462.50 |
Wafer Size
125mm, 150mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
300 - 5,000 |
$787.50 |
$750.00 |
5,001 - 10,000 |
$862.50 |
$825.00 |
10,001 - 20,000 |
$1,050.00 |
$1,012.50 |
20,001 - 30,000 |
$1,237.50 |
$1,200.00 |
30,000 - 40,000 |
$1,425.00 |
$1,387.50 |
40,001 - 50,000 |
$1,612.50 |
$1,575.00 |
Wafer Size
200mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
300 - 5,000 |
$1,012.50 |
$975.00 |
5,001 - 10,000 |
$1,087.50 |
$1,050.00 |
10,001 - 20,000 |
$1,275.00 |
$1,237.50 |
20,001 - 30,000 |
$1,462.00 |
$1,425.00 |
30,000 - 40,000 |
$1,650.00 |
$1,612.50 |
40,001 - 50,000 |
$1,837.50 |
$1,800.00 |