PECVD OxyNitride

Our PECVD OxyNitride is a unique film that is widely used in the fabrication of MEMS and Opto-Electronics devices. PECVD OxyNitride is mechanically stable and possesses optical properties that make this film ideal for building waveguides and integrated circuits. E-mail for lead time. 

Note:

  1. Non-Silicon Substrates  please e-mail for a quote

  2. We invoice in batches of 25 wafers .   For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 7%

  4. Non - Semi  Standard Thickness wafers need to be quoted for each order.

  5. Targeted Refractive Index (RI) OxyNitride is Available. Please e-mail for a quote.


      PECVD OxyNitride Parameters

      Thickness
      300Å – 20,00Å
      Thickness Tolerance
      300Å  - 999Å +/-10%; => 1,000Å+/-7%
      Sides Pressed
      One
      Refractive Index
      1.71 +/-0.05 @ 632.8nm
      Film Stress
      -400MPa +/-50MPa (Compressive)
      Wafer Material
      Silicon, Silicon on Insulator, Quartz, Glass, Sapphire
      Wafer Thickness
      Std. Thickness
      Temperature 300C°- 400C°
      Gases Silane, Ammonia, Nitrous oxide
      Equipment PlasmaTherm and Novelles Deposition tools

      Wafer Size
      50.8mm, 76.2mm, 100mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $637.50
      $600.00
      5,001 - 10,000
      $750.00
      $712.50
      10,001 - 20,000
      $937.50
      $900.00
      20,001 - 30,000
      $1,125.00
      $1,087.50
      30,000 - 40,000
      $1,312.00
      $1,275.00
      40,001 - 50,000
      $1,500.00
      $1,462.50

      Wafer Size
      125mm, 150mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $787.50
      $750.00
      5,001 - 10,000
      $862.50
      $825.00
      10,001 - 20,000
      $1,050.00
      $1,012.50
      20,001 - 30,000
      $1,237.50
      $1,200.00
      30,000 - 40,000
      $1,425.00
      $1,387.50
      40,001 - 50,000
      $1,612.50
      $1,575.00

      Wafer Size
      200mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $1,012.50
      $972.00
      5,001 - 10,000
      $1,087.50
      $1,050.00
      10,001 - 20,000
      $1,275.00
      $1,237.00
      20,001 - 30,000
      $1,462.00
      $1,425.00
      30,000 - 40,000
      $1,625.00
      $1,612.00
      40,001 - 50,000
      $1,837.50
      $1,800.00