2022 Pricing effective 10/1/21

PECVD OxyNitride

Our PECVD OxyNitride is a unique film that is widely used in the fabrication of MEMS and Opto-Electronics devices. PECVD OxyNitride is mechanically stable and possesses optical properties that make this film ideal for building waveguides and integrated circuits. E-mail for lead time. 

Note:

  1. Non-Silicon Substrates  please e-mail for a quote

  2. We invoice in batches of 25 wafers .   For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 7%

  4. Non - Semi  Standard Thickness wafers need to be quoted for each order.

  5. Targeted Refractive Index (RI) OxyNitride is Available. Please e-mail for a quote.


      PECVD OxyNitride Parameters

      Thickness
      300Å – 50,000Å
      Thickness Tolerance
      300Å  - 999Å +/-10%; => 1,000Å+/-7%
      Sides Pressed
      One
      Refractive Index
      1.71 +/-0.05 @ 632.8nm
      Film Stress
      -400MPa +/-50MPa (Compressive)
      Wafer Material
      Silicon, Silicon on Insulator, Quartz, Glass, Sapphire
      Wafer Thickness
      Std. Thickness
      Temperature 300C°- 400C°
      Gases Silane, Ammonia, Nitrous oxide
      Equipment PlasmaTherm and Novelles Deposition tools

      Wafer Size
      50.8mm, 76.2mm, 100mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $720.00
      $680.00
      5,001 - 10,000
      $840.00 $800.00
      10,001 - 20,000
      $1,040.00
      $1,000.00
      20,001 - 30,000
      $1,240.00 $1,200.00
      30,000 - 40,000
      $1,440.00
      $1,400.00
      40,001 - 50,000
      $1,640.00 $1,600.00

      Wafer Size
      125mm, 150mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $880.00
      $840.00
      5,001 - 10,000
      $960.00 $920.00
      10,001 - 20,000
      $1,160.00
      $1,120.00
      20,001 - 30,000
      $1,360.00 $1,320.00
      30,000 - 40,000
      $1,560.00
      $1,520.00
      40,001 - 50,000
      $1,760.00 $1,720.00

      Wafer Size
      200mm

      Thickness ( Å )
      Price per Lot
      1 Lot
      Price per Lot
      4 + lots
      300 - 5,000
      $1,120.00
      $1,080.00
      5,001 - 10,000
      $1,200.00 $1,160.00
      10,001 - 20,000
      $1,400.00
      $1,360.00
      20,001 - 30,000
      $1,600.00 $1,560.00
      30,000 - 40,000
      $1,800.00 $1,760.00
      40,001 - 50,000
      $2,000.00
      $1,960.00