PECVD Oxide

Our PECVD Oxide is a single sided film that has been optimized for wafers requiring minimal thermal processing.  Because PECVD is a deposited oxide, it offers greater flexibility than thermal oxide and can be deposited over any of our other thin films.

E-mail for lead time.

Note:

  1. Non-Silicon Substrates  please e-mail for a quote

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 7%

  4. Non - Semi Standard Thickness wafers need to be quoted for each order.


    PECVD Oxide Parameters

    Thickness
    300Å – 50,00Å
    Thickness Tolerance
    300Å  - 999Å +/-10%; => 1,000Å+/-7%
    Sides Pressed
    One
    Refractive Index
    1.46 +/-0.02 @ 632.8nm
    Film Stress
    -400MPa +/-50MPa (Compressive)
    Wafer Material
    Silicon, Silicon on Insulator, Quartz, Glass, Sapphire
    Wafer Thickness
    Std. Thickness
    Temperature 300C°- 400C°
    Gases Silane, Nitrous oxide
    Equipment PlasmaTherm and Novelles Deposition tools

    Wafer Size
    50.8mm, 76.2mm, 100mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $480.00
    $440.00
    5,001 - 10,000
    $560.00
    $520.00
    10,001 - 20,000
    $720.00
    $680.00
    20,001 - 30,000
    $880.00
    $840.00
    30,001 - 40,000
    $1,040.00
    $1,000.00
    40,001 - 50,000
    $1,200.00
    $1,160.00

    Wafer Size
    125mm,150mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $600.00 $560.00
    5,001 - 10,000
    $680.00
    $640.00
    10,001 - 20,000
    $800.00
    $760.00
    20,001 - 30,000
    $960.00
    $920.00
    30,001 - 40,000
    $1,120.00
    $1,080.00
    40,001 - 50,000
    $1,280.00
    $1,240.00

    Wafer Size
    200mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $880.00
    $840.00
    5,001 - 10,000
    $960.00
    $920.00
    10,001 - 20,000
    $1,120.00
    $1,080.00
    20,001 - 30,000
    $1,280.00
    $1,240.00
    30,001 - 40,000
    $1,440.00
    $1,400.00
    40,001 - 50,000
    $1,600.00
    $1,560.00