PECVD Oxide

Our PECVD Oxide is a single sided film that has been optimized for wafers requiring minimal thermal processing.  Because PECVD is a deposited oxide, it offers greater flexibility than thermal oxide and can be deposited over any of our other thin films.

E-mail for lead time.

Note:

  1. Non-Silicon Substrates  please e-mail for a quote

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 7%

  4. Non - Semi Standard Thickness wafers need to be quoted for each order.


    PECVD Oxide Parameters

    Thickness
    300Å – 50,00Å
    Thickness Tolerance
    300Å  - 999Å +/-10%; => 1,000Å+/-7%
    Sides Pressed
    One
    Refractive Index
    1.98 +/-0.05 @ 632.8nm
    Film Stress
    -400MPa +/-50MPa (Compressive)
    Wafer Material
    Silicon, Silicon on Insulator, Quartz, Glass, Sapphire
    Wafer Thickness
    Std. Thickness
    Temperature 300C°- 400C°
    Gases Silane, Nitrous oxide
    Equipment PlasmaTherm and Novelles Deposition tools

    Wafer Size
    50.8mm, 76.2mm, 100mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $450.00
    $412.50
    5,001 - 10,000
    $525.00
    $487.50
    10,001 - 20,000
    $675.00
    $637.50
    20,001 - 30,000
    $825.00
    $787.50
    30,000 - 40,000
    $975.00
    $937.50
    40,001 - 50,000
    $1,125.00
    $1,087.50

    Wafer Size
    125mm,150mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $562.00
    $525.00
    5,001 - 10,000
    $637.50
    $600.00
    10,001 - 20,000
    $750.00
    $712.50
    20,001 - 30,000
    $900.00
    $862.50
    30,000 - 40,000
    $1,050.00
    $1,012.50
    40,001 - 50,000
    $1,200.00
    $1,162.50

    Wafer Size
    200mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    300 - 5,000
    $825.00
    $787.50
    5,001 - 10,000
    $900.00
    $862.50
    10,001 - 20,000
    $1,050.00
    $1,012.50
    20,001 - 30,000
    $1,200.00
    $1,162.50
    30,000 - 40,000
    $1,350.00
    $1,312.50
    40,001 - 50,000
    $1,500.00
    $1,462.50