2022 Pricing effective 10/1/21

PECVD Nitride

Our PECVD Nitride is a single sided film that has been optimized for wafers requiring minimal thermal processing.  Because PECVD Nitride is deposited at low temperatures, it offers greater flexibility and can be deposited over any of our other thin films.  Please see our “Low Stress PECVD Nitride Price List” for thicknesses greater than 5,000Å.  E-mail for lead time.

Note:

  1. Non-Silicon Substrates  please e-mail for a quote . 

  2. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  3. Typical WTWNU and WIWNU is +/- 7%

  4. Non - Semi Standard Thickness wafers need to be quoted for each order.


PECVD Nitride Parameters

Thickness
 300Å – 5,000Å
Thickness Tolerance
 300Å  - 999Å +/-15%;  ≥1,000Å+/-7%
Sides Pressed
 One
Refractive Index
 1.98 +/-0.05 @ 632.8nm
Film Stress
 +400MPa +/-50MPa (Tensile Stress)
Wafer Material
 Silicon, Silicon on Insulator
Wafer Thickness
 Std. Thickness
Temperature 300C°- 400C°
Gases Silane, Ammonia, Nitrous Oxide
Equipment PlasmaTherm and Novelles Deposition tools

Wafer Size
50.8mm, 76.2mm, 100mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
300 - 5,000
 $600.00
 $560.00

Wafer Size
125mm, 150mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
300 - 5,000
 $720.00
 $680.00

Wafer Size
200mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
300 - 5,000
 $1,000.00
 $960.00

Wafer Size
300mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
300 - 3,000
 $2,975.00
 $2,975.00