LPCVD Low Stress Polysilicon (580)

Polysilicon has many uses in MOS and MEMS applications. LPCVD Low Stress Polysilicon is deposited when Silane (SiH 4) decomposes into Silicon (Si) and Hydrogen (2H 2) at temperatures above 580C. Process pressure and temperature is optimized to provide Polysilicon films with a high degree of crystallinity and uniformity. Process temperature can be adjusted to change grain size and film stress. Film stress may be further reduced with a post-deposition anneal. Rogue Valley Microdevices offers a variety of Polysilicon films. By tailoring deposition conditions, we can offer Polysilicon films in standard or small (fine) grain film composition, and also offer different film stress levels, which is ideal for many MEMS specific applications. Prior to deposition wafers will be inspected and receive a pre-process clean if necessary. 

Note:

  1. No Glass wafers Material cannot handle high process temperatures.   

  2. Sapphire and Quartz substrates  please e-mail for a quote.

  3. We invoice in batches of 25 wafers .  For example, if 35 wafers are processed the invoice will still equal the amount for 50 wafers.

  4. Film Thickness > 5,000 angstroms  please e-mail for a quote.

  5. Typical WTWNU and WIWNU is +/- 5%

  6. Non - Semi Standard Thickness wafers need to be quoted for each order.


    Stoichiometrice Nitride Parameters

    Thickness
    100Å – 5,000Å
    Thickness Tolerance
    100Å +/- 30%; 200Å +/-20%; 250Å-300Å +/-15%;         350Å - 500Å +/-10%; > 500Å+/-5%
    Sides Pressed
    Both
    Refractive Index
    Data Available
    Film Stress
    Data Available
    Wafer Material
    Silicon, Silicon on Insulator, Quartz, Sapphire
    Wafer Thickness
    Semi-Std. Thickness
    Temperature 580 - 800C°
    Gases Salane
    Equipment Horizontal Furnace

    Wafer Size
    50.8mm, 76.2mm, 100mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $375.00
    $337.50
    1,001 - 2,000
    $393.75
    $356.25
    2,001 - 3,000
    $412.50
    $375.00
    3,001 - 4,000
    $431.25 $393.75
    4,001 - 5,000
    $450.00 $412.50
    5,001 - 6,000
    $468.75 $431.25
    6,001 - 7000
    $487.50 $450.00
    7,001 - 8,000
    $506.25
    $468.75
    8,001 - 9,000
    $525.00 $487.50
    9,001 - 10,000
    $543.75 $506.25
    10,001 - 11,000
    $562.50 $525.00
    11,001 - 12,000
    $581.25 $543.75
    12,001 - 13,000
    $600.00 $562.50
    13,001 - 14,000
    $618.75 $581.25
    14,001 - 15,000
    $637.50 $600.00
    15,001 - 16,000
    $565.25 $618.75
    16,001 - 17,000
    $675.00 $637.50
    17,001 - 18,000
    $693.75 $656.25
    18,001 - 19,000
    $712.50
    $675.00
    19,001 - 20,000
    $731.25
    $693.75

    Wafer Size
    125mm,150mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $412.50
    $375.00
    1,001 - 2,000
    $431.25
    $393.75
    2,001 - 3,000
    $450.00
    $412.50
    3,001 - 4,000
    $468.75 $431.25
    4,001 - 5,000
    $487.50 $450.00
    5,001 - 6,000
    $506.25 $468.75
    6,001 - 7000
    $525.00 $487.50
    7,001 - 8,000
    $543.75
    $506.25
    8,001 - 9,000
    $562.50 $525.00
    9,001 - 10,000
    $581.25 $543.75
    10,001 - 11,000
    $600.00
    $562.50
    11,001 - 12,000
    $618.75 $581.25
    12,001 - 13,000
    $637.50 $600.00
    13,001 - 14,000
    $656.25 $618.75
    14,001 - 15,000
    $675.00 $637.50
    15,001 - 16,000
    $693.75 $656.25
    16,001 - 17,000
    $712.50 $675.00
    17,001 - 18,000
    $731.25 $693.75
    18,001 - 19,000
    $750.00
    $712.50
    19,001 - 20,000
    $768.75
    $731.25

    Wafer Size
    200mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $600.00
    $562.50
    1,001 - 2,000
    $618.75
    $581.25
    2,001 - 3,000
    $637.50
    $600.00
    3,001 - 4,000
    $656.25 $618.75
    4,001 - 5,000
    $675.00 $637.50
    5,001 - 6,000
    $693.75 $656.25
    6,001 - 7000
    $712.50 $675.00
    7,001 - 8,000
    $731.25
    $693.75
    8,001 - 9,000
    $750.00 $712.50
    9,001 - 10,000
    $768.75 $731.25
    10,001 - 11,000
    $787.50 $750.00
    11,001 - 12,000
    $806.25 $768.75
    12,001 - 13,000
    $825.00 $787.50
    13,001 - 14,000
    $843.75 $806.25
    14,001 - 15,000
    $862.50 $825.00
    15,001 - 16,000
    $881.25 $843.75
    16,001 - 17,000
    $900.00 $862.50
    17,001 - 18,000
    $918.75 $881.25
    18,001 - 19,000
    $937.50
    $900.00
    19,001 - 20,000
    $956.25
    $918.75