Low Stress LPCVD Nitride 

Our Low Stress Nitride retains all of the same benefits associated with our standard nitride but can also be used for Membranes, Cantilever Beams and other mechanical structures associated with MEMS devices. This Silicon Rich Film is excellent as a KOH Etch Mask. Prior to LPCVD Nitride deposition all wafers will be inspected and receive a pre-process clean if necessary. A Stress Monitor is available for an additional US$75.00 per batch of 25 wafers. Film Thickness MUST be >2,000 angstroms for a stress monitor and data.

Note:

  1. No Glass wafers because they will melt. 

  2. Sapphire substrates please e-mail for a quote . Quartz must be Super Low Stress LPCVD Nitride.

  3. We invoice in batches of 25 wafers.  For example, if 49 wafers are sent the invoice will still equal the amount for 50 wafers.

  4. Targeted Stress Available.  Please e-mail requirements for a quote.

  5. Typical WTWNU and WIWNU is +/- 5%

  6. Non-Semi Standard Thickness wafers need to be quoted for each order.

  Low Stress Nitride Parameters

Thickness
100Å – 20,000Å
Thickness Tolerance
100Å +/- 30%; 200Å +/-20%; 250Å-300Å +/-15%;         350Å - 500Å +/-10%; > 500Å+/-5%
Sides Pressed
Both
Refractive Index
2.20 +/-0.05 @ 632.8nm
Film Stress
<250MPa +/-50MPa Tensile Stress
Wafer Material
Silicon, Silicon on Insulator
Wafer Thickness
Std. Thickness
Temperature ~820C°
Gases Dichlorosilane, Ammonia
Equipment Horizontal Furnace

Wafer Size
50.8mm, 76.2mm, 100mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
100 - 1,000
$600.00
$560.00
1,001 - 2,000
$660.00
$680.00
2,001 - 3,000
$720.00
$680.00
3,001 - 4,000
$780.00
$760.00
4,000 - 5,000
$840.00
$820.00
5,001 - 6,000
$900.00
$880.00
6,001 - 7,000
$960.00
$940.00
7,001 - 8,000
$1,020.00
$1,00.00
8,001 - 9,000
$1,080.00
$1,060.00
9,001 - 10,000
$1,140.00
$1,120.00
10,001 - 11,000
$1,200.00
$1,180.00
11,001 - 12,000
$1,260.00
$1,240.00
12,001 - 13,000
$1,320.00
$1,300.00
13,001 - 14,000
$1,380.00
$1,360.00
14,001 - 15,000
$1,440.00
$1,420.00
15,001 - 16,000
$1,500.00
$1,480.00
16,001 - 17,000
$1,560.00
$1,540.00
17,001 - 18,000
$1,620.00
$1,600.00
18,001 - 19,000
$1,680.00
$1,660.00
19,001 - 20,000
$1,740.00
$1,720.00

Wafer Size
125mm, 150mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
100 - 1,000
$640.00
$600.00
1,001 - 2,000
$700.00
$660.00
2,001 - 3,000
$760.00
$720.00
3,001 - 4,000
$820.00
$780.00
4,000 - 5,000
$880.00
$840.00
5,001 - 6,000
$940.00
$900.00
6,001 - 7,000
$1,000.00
$960.00
7,001 - 8,000
$1,060.00
$1,020.00
8,001 - 9,000
$1,120.00
$1,080.00
9,001 - 10,000
$1,180.00
$1,140.00
10,001 - 11,000
$1,240.00
$1,200.00
11,001 - 12,000
$1,300.00
$1,260.00
12,001 - 13,000
$1,360.00
$1,320.00
13,001 - 14,000
$1,420.00
$1,380.00
14,001 - 15,000
$1,480.00
$1,440.00
15,001 - 16,000
$1,540.00
$1,500.00
16,001 - 17,000
$1,600.00
$1,560.00
17,001 - 18,000
$1,660.00
$1,620.00
18,001 - 19,000
$1,720.00
$1,680.00
19,001 - 20,000
$1,780.00
$1,740.00

Wafer Size
200mm

Thickness ( Å )
Price per Lot
1 Lot
Price per Lot
4 + lots
100 - 1,000
$1,200.00
$1,160.00
1,001 - 2,000
$1,260.00
$1,220.00
2,001 - 3,000
$1,320.00
$1,280.00
3,001 - 4,000
$1,380.00
$1,340.00
4,000 - 5,000
$1,440.00
$1,400.00
5,001 - 6,000
$1,500.00
$1,460.00
6,001 - 7,000
$1,560.00
$1,520.00
7,001 - 8,000
$1,620.00
$1,580.00
8,001 - 9,000
$1,680.00
$1,640.00
9,001 - 10,000
$1,740.00
$1,700.00
10,001 - 11,000
$1,800.00
$1,760.00
11,001 - 12,000
$1,860.00
$1,820.00
12,001 - 13,000
$1,920.00
$1,880.00
13,001 - 14,000
$1,980.00
$1,940.00
14,001 - 15,000
$2,040.00
$2,000.00
15,001 - 16,000
$2,100.00
$2,060.00
16,001 - 17,000
$2,160.00
$2,120.00
17,001 - 18,000
$2,220.00
$2,180.00
18,001 - 19,000
$2,280.00
$2,240.00
19,001 - 20,000
$2,340.00
$2,300.00