2022 Pricing effective 10/1/21

Super Low Stress LPCVD Nitride 

Our Super Low Stress Nitride has been developed for applications that require extremely low film stress or a film that is Silicon Rich. Prior to LPCVD Nitride deposition all wafers will be inspected and receive a pre-process clean if necessary. A Stress Monitor is available for an additional US$100.00 per batch of 25 wafers. Film Thickness MUST be >2,000 angstroms for a stress monitor and data.

Note:

  1. Sapphire and Quartz substrates  please e-mail for a quote.

  2. We invoice in batches of 25 wafers.  For example, if 49 wafers are sent the invoice will still equal the amount for 50 wafers.

  3. Targeted Stress Available.  Please e-mail requirements for a quote.

  4. Typical WTWNU and WIWNU is +/- 5%

  5. Non-Semi Standard Thickness wafers need to be quoted for each order

      Super Low Stress Nitride Parameters

    Thickness
    100Å – 20,000Å
    Thickness Tolerance
    100Å - 149Å +/- 30%; 150Å - 299Å +/-20%;
    300Å - 499Å +/-10%; > 500Å+/-5%
    Sides Pressed
    Both
    Refractive Index
    2.30 +/-0.05 @ 632.8nm
    Film Stress
    <100MPa +/-50MPa Tensile Stress
    Wafer Material
    Silicon, Silicon on Insulator
    Wafer Thickness
    Std. Thickness
    Temperature ~820C°
    Gases Dichlorosilane, Ammonia
    Equipment Horizontal Furnace

    Wafer Size
    50.8mm, 76.2mm, 100mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $722.50
    $680.00
    1,001 - 2,000
    $786.25 $743.75
    2,001 - 3,000 $850.00
    $807.50
    3,001 - 4,000
    $913.75 $871.25
    4,000 - 5,000
    $977.50
    $935.00
    5,001 - 6,000
    $1,041.25 $998.75
    6,001 - 7,000
    $1,105.00
    $1,062.50
    7,001 - 8,000
    $1,168.75 $1,126.25
    8,001 - 9,000
    $1,232.50
    $1,190.00
    9,001 - 10,000
    $1,296.25 $1,253.75
    10,001 - 11,000
    $1,360.00
    $1,317.50
    11,001 - 12,000
    $1,423.75 $1,381.25
    12,001 - 13,000
    $1,487.50
    $1,445.00
    13,001 - 14,000
    $1,551.25 $1,508.75
    14,001 - 15,000
    $1,615.00
    $1,572.50
    15,001 - 16,000
    $1,678.75 $1,636.25
    16,001 - 17,000
    $1,742.50
    $1,700.00
    17,001 - 18,000
    $1,806.25 $1,763.75
    18,001 - 19,000
    $1,870.00
    $1,827.50
    19,001 - 20,000
    $1,933.75 $1,891.25

    Wafer Size
    125mm, 150mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $765.00
    $722.50
    1,001 - 2,000
    $828.75 $786.25
    2,001 - 3,000 $892.50
    $850.00
    3,001 - 4,000
    $956.25 $913.75
    4,000 - 5,000
    $1,020.00
    $977.50
    5,001 - 6,000
    $1,083.75 $1,041.25
    6,001 - 7,000
    $1,147.50 $1,105.00
    7,001 - 8,000
    $1,211.25 $1,168.75
    8,001 - 9,000
    $1,275.00
    $1,232.50
    9,001 - 10,000
    $1,338.75 $1,296.25
    10,001 - 11,000
    $1,402.50
    $1,360.00
    11,001 - 12,000
    $1,466.25 $1,423.75
    12,001 - 13,000
    $1,530.00
    $1,487.50
    13,001 - 14,000
    $1,593.75 $1,551.25
    14,001 - 15,000
    $1,657.50
    $1,615.00
    15,001 - 16,000
    $1,721.25 $1,678.75
    16,001 - 17,000
    $1,785.00
    $1,742.50
    17,001 - 18,000
    $1,848.75 $1,806.25
    18,001 - 19,000
    $1,912.50
    $1,870.00
    19,001 - 20,000
    $1,976.25 $1,933.75

    Wafer Size
    200mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    $1,402.50
    $1,360.00
    1,001 - 2,000
    $1,466.25 $1,423.75
    2,001 - 3,000 $1,530.00
    $1,487.50
    3,001 - 4,000
    $1,593.75 $1,551.25
    4,000 - 5,000
    $1,657.50
    $1,615.00
    5,001 - 6,000
    $1,721.25 $1,678.75
    6,001 - 7,000
    $1,785.00
    $1,742.50
    7,001 - 8,000
    $1,848.75 $1,806.25
    8,001 - 9,000
    $1,912.50
    $1,870.00
    9,001 - 10,000
    $1,955.00 $1,933.75
    10,001 - 11,000
    $2,040.00
    $1,997.50
    11,001 - 12,000
    $2,103.75
    $2,061.25
    12,001 - 13,000
    $2,167.50 $2,125.00
    13,001 - 14,000
    $2,231.25
    $2,188.75
    14,001 - 15,000
    $2,295.00
    $2,252.50
    15,001 - 16,000
    $2,358.75 $2,316.25
    16,001 - 17,000
    $2,422.50
    $2,380.00
    17,001 - 18,000
    $2,486.25 $2,443.75
    18,001 - 19,000
    $2,550.00
    $2,507.50
    19,001 - 20,000
    $2,613.75 $2,571.25