Super Low Stress LPCVD Nitride
Our Super Low Stress Nitride has been developed for applications that require extremely low film stress or a film that is Silicon Rich. Prior to LPCVD Nitride deposition all wafers will be inspected and receive a pre-process clean if necessary. A Stress Monitor is available for an additional US$75.00 per batch of 25 wafers. Film Thickness MUST be >2,000 angstroms for a stress monitor and data.
Note:
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Sapphire and Quartz substrates please e-mail for a quote.
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We invoice in batches of 25 wafers. For example, if 49 wafers are sent the invoice will still equal the amount for 50 wafers.
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Targeted Stress Available. Please e-mail requirements for a quote.
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Typical WTWNU and WIWNU is +/- 5%
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Non-Semi Standard Thickness wafers need to be quoted for each order
Super Low Stress Nitride Parameters |
|
Thickness |
100Å – 20,000Å |
Thickness Tolerance |
100Å +/- 30%; 200Å +/-20%; 250Å-300Å +/-15%; 350Å - 500Å +/-10%; > 500Å+/-5% |
Sides Pressed |
Both |
Refractive Index |
2.30 +/-0.05 @ 632.8nm |
Film Stress |
<100MPa +/-50MPa Tensile Stress |
Wafer Material |
Silicon, Silicon on Insulator |
Wafer Thickness |
Std. Thickness |
Temperature | ~820C° |
Gases | Dichlorosilane, Ammonia |
Equipment | Horizontal Furnace |
Wafer Size
50.8mm, 76.2mm, 100mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
100 - 1,000 |
$640.00 |
$600.00 |
1,001 - 2,000 |
$700.00 |
$660.00 |
2,001 - 3,000 | $760.00 |
$720.00 |
3,001 - 4,000 |
$820.00 |
$780.00 |
4,000 - 5,000 |
$880.00 |
$840.00 |
5,001 - 6,000 |
$940.00 |
$900.00 |
6,001 - 7,000 |
$1,000.00 |
$960.00 |
7,001 - 8,000 |
$1,060.00 |
$1,020.00 |
8,001 - 9,000 |
$1,120.00 |
$1,080.00 |
9,001 - 10,000 |
$1,180.00 |
$1,140.00 |
10,001 - 11,000 |
$1,240.00 |
$1,200.00 |
11,001 - 12,000 |
$1,300.00 |
$1,260.00 |
12,001 - 13,000 |
$1,360.00 |
$1,320.00 |
13,001 - 14,000 |
$1,420.00 |
$1,380.00 |
14,001 - 15,000 |
$1,480.00 |
$1,440.00 |
15,001 - 16,000 |
$1,540.00 |
$1,500.00 |
16,001 - 17,000 |
$1,600.00 |
$1,560.00 |
17,001 - 18,000 |
$1,660.00 |
$1,620.00 |
18,001 - 19,000 |
$1,720.00 |
$1,680.00 |
19,001 - 20,000 |
$1,780.00 |
$1,740.00 |
Wafer Size
125mm, 150mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
100 - 1,000 |
$680.00 |
$640.00 |
1,001 - 2,000 |
$740.00 |
$700.00 |
2,001 - 3,000 | $800.00 |
$760.00 |
3,001 - 4,000 |
$860.00 |
$820.00 |
4,000 - 5,000 |
$920.00 |
$880.00 |
5,001 - 6,000 |
$980.00 |
$940.00 |
6,001 - 7,000 |
$1,040.00 |
$1,000.00 |
7,001 - 8,000 |
$1,100.00 |
$1,060.00 |
8,001 - 9,000 |
$1,160.00 |
$1,120.00 |
9,001 - 10,000 |
$1,220.00 |
$1,180.00 |
10,001 - 11,000 |
$1,280.00 |
$1,240.00 |
11,001 - 12,000 |
$1,340.00 |
$1,300.00 |
12,001 - 13,000 |
$1,400.00 |
$1,360.00 |
13,001 - 14,000 |
$1,460.00 |
$1,420.00 |
14,001 - 15,000 |
$1,520.00 |
$1,480.00 |
15,001 - 16,000 |
$1,580.00 |
$1,540.00 |
16,001 - 17,000 |
$1,640.00 |
$1,600.00 |
17,001 - 18,000 |
$1,700.00 |
$1,660.00 |
18,001 - 19,000 |
$1,760.00 |
$1,720.00 |
19,001 - 20,000 |
$1,820.00 |
$1,780.00 |
Wafer Size
200mm
Thickness ( Å ) |
Price per
Lot
|
Price per
Lot
|
100 - 1,000 |
$1,280.00 |
$1,240.00 |
1,001 - 2,000 |
$1,340.00 |
$1,300.00 |
2,001 - 3,000 | $1,400.00 |
$1,360.00 |
3,001 - 4,000 |
$1,460.00 |
$1,420.00 |
4,000 - 5,000 |
$1,520.00 |
$1,480.00 |
5,001 - 6,000 |
$1,580.00 |
$1,540.00 |
6,001 - 7,000 |
$1,640.00 |
$1,600.00 |
7,001 - 8,000 |
$1,700.00 |
$1,660.00 |
8,001 - 9,000 |
$1,760.00 |
$1,720.00 |
9,001 - 10,000 |
$1,820.00 |
$1,780.00 |
10,001 - 11,000 |
$1,880.00 |
$1,840.00 |
11,001 - 12,000 |
$1,940.00 |
$1,900.00 |
12,001 - 13,000 |
$2,000.00 |
$1,960.00 |
13,001 - 14,000 |
$2,060.00 |
$2,020.00 |
14,001 - 15,000 |
$2,120.00 |
$2,080.00 |
15,001 - 16,000 |
$2,180.00 |
$2,140.00 |
16,001 - 17,000 |
$2,240.00 |
$2,200.00 |
17,001 - 18,000 |
$2,300.00 |
$2,260.00 |
18,001 - 19,000 |
$2,360.00 |
$2,320.00 |
19,001 - 20,000 |
$2,420.00 |
$2,380.00 |