Super Low Stress LPCVD Nitride 

Our Super Low Stress Nitride has been developed for applications that require extremely low film stress or a film that is Silicon Rich. Prior to LPCVD Nitride deposition all wafers will be inspected and receive a pre-process clean if necessary. A Stress Monitor is available for an additional US$75.00 per batch of 25 wafers. Film Thickness MUST be >2,000 angstroms for a stress monitor and data.

Note:

  1. Sapphire and Quartz substrates  please e-mail for a quote.

  2. We invoice in batches of 25 wafers.  For example, if 49 wafers are sent the invoice will still equal the amount for 50 wafers.

  3. Targeted Stress Available.  Please e-mail requirements for a quote.

  4. Typical WTWNU and WIWNU is +/- 5%

  5. Non-Semi Standard Thickness wafers need to be quoted for each order

      Super Low Stress Nitride Parameters

    Thickness
    		 100Å – 20,000Å
    Thickness Tolerance
    		 100Å +/- 30%; 200Å +/-20%; 250Å-300Å +/-15%;         350Å - 500Å +/-10%; > 500Å+/-5%
    Sides Pressed
    		 Both
    Refractive Index
    		 2.30 +/-0.05 @ 632.8nm
    Film Stress
    		 <100MPa +/-50MPa Tensile Stress
    Wafer Material
    		 Silicon, Silicon on Insulator
    Wafer Thickness
    		 Std. Thickness
    Temperature ~820C°
    Gases Dichlorosilane, Ammonia
    Equipment Horizontal Furnace

    Wafer Size
    50.8mm, 76.2mm, 100mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    		 $640.00
    		 $600.00
    1,001 - 2,000
    		 $700.00
    		 $660.00
    2,001 - 3,000 $760.00
    		 $720.00
    3,001 - 4,000
    		 $820.00
    		 $780.00
    4,000 - 5,000
    		 $880.00
    		 $840.00
    5,001 - 6,000
    		 $940.00
    		 $900.00
    6,001 - 7,000
    		 $1,000.00
    		 $960.00
    7,001 - 8,000
    		 $1,060.00
    		 $1,020.00
    8,001 - 9,000
    		 $1,120.00
    		 $1,080.00
    9,001 - 10,000
    		 $1,180.00
    		 $1,140.00
    10,001 - 11,000
    		 $1,240.00
    		 $1,200.00
    11,001 - 12,000
    		 $1,300.00
    		 $1,260.00
    12,001 - 13,000
    		 $1,360.00
    		 $1,320.00
    13,001 - 14,000
    		 $1,420.00
    		 $1,380.00
    14,001 - 15,000
    		 $1,480.00
    		 $1,440.00
    15,001 - 16,000
    		 $1,540.00
    		 $1,500.00
    16,001 - 17,000
    		 $1,600.00
    		 $1,560.00
    17,001 - 18,000
    		 $1,660.00
    		 $1,620.00
    18,001 - 19,000
    		 $1,720.00
    		 $1,680.00
    19,001 - 20,000
    		 $1,780.00
    		 $1,740.00

    Wafer Size
    125mm, 150mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    		 $680.00
    		 $640.00
    1,001 - 2,000
    		 $740.00
    		 $700.00
    2,001 - 3,000 $800.00
    		 $760.00
    3,001 - 4,000
    		 $860.00
    		 $820.00
    4,000 - 5,000
    		 $920.00
    		 $880.00
    5,001 - 6,000
    		 $980.00
    		 $940.00
    6,001 - 7,000
    		 $1,040.00
    		 $1,000.00
    7,001 - 8,000
    		 $1,100.00
    		 $1,060.00
    8,001 - 9,000
    		 $1,160.00
    		 $1,120.00
    9,001 - 10,000
    		 $1,220.00
    		 $1,180.00
    10,001 - 11,000
    		 $1,280.00
    		 $1,240.00
    11,001 - 12,000
    		 $1,340.00
    		 $1,300.00
    12,001 - 13,000
    		 $1,400.00
    		 $1,360.00
    13,001 - 14,000
    		 $1,460.00
    		 $1,420.00
    14,001 - 15,000
    		 $1,520.00
    		 $1,480.00
    15,001 - 16,000
    		 $1,580.00
    		 $1,540.00
    16,001 - 17,000
    		 $1,640.00
    		 $1,600.00
    17,001 - 18,000
    		 $1,700.00
    		 $1,660.00
    18,001 - 19,000
    		 $1,760.00
    		 $1,720.00
    19,001 - 20,000
    		 $1,820.00
    		 $1,780.00

    Wafer Size
    200mm

    Thickness ( Å )
    Price per Lot
    1 Lot
    Price per Lot
    4 + lots
    100 - 1,000
    		 $1,280.00
    		 $1,240.00
    1,001 - 2,000
    		 $1,340.00
    		 $1,300.00
    2,001 - 3,000 $1,400.00
    		 $1,360.00
    3,001 - 4,000
    		 $1,460.00
    		 $1,420.00
    4,000 - 5,000
    		 $1,520.00
    		 $1,480.00
    5,001 - 6,000
    		 $1,580.00
    		 $1,540.00
    6,001 - 7,000
    		 $1,640.00
    		 $1,600.00
    7,001 - 8,000
    		 $1,700.00
    		 $1,660.00
    8,001 - 9,000
    		 $1,760.00
    		 $1,720.00
    9,001 - 10,000
    		 $1,820.00
    		 $1,780.00
    10,001 - 11,000
    		 $1,880.00
    		 $1,840.00
    11,001 - 12,000
    		 $1,940.00
    		 $1,900.00
    12,001 - 13,000
    		 $2,000.00
    		 $1,960.00
    13,001 - 14,000
    		 $2,060.00
    		 $2,020.00
    14,001 - 15,000
    		 $2,120.00
    		 $2,080.00
    15,001 - 16,000
    		 $2,180.00
    		 $2,140.00
    16,001 - 17,000
    		 $2,240.00
    		 $2,200.00
    17,001 - 18,000
    		 $2,300.00
    		 $2,260.00
    18,001 - 19,000
    		 $2,360.00
    		 $2,320.00
    19,001 - 20,000
    		 $2,420.00
    		 $2,380.00